7/18/2011	10:11:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2011	10:11:32 AM	Recipe started at 10:11 AM
7/18/2011	10:11:32 AM	Helium valve closed
7/18/2011	10:11:32 AM	H2 valve closed
7/18/2011	10:11:32 AM	BCl3 valve closed
7/18/2011	10:11:32 AM	PH3 valve closed
7/18/2011	10:11:32 AM	SiCl4 pre valve closed
7/18/2011	10:11:32 AM	SiCl4 post valve closed
7/18/2011	10:11:32 AM	Main Vac valve closed
7/18/2011	10:11:32 AM	Bypass valve closed
7/18/2011	10:11:32 AM	Bubbler valve closed
7/18/2011	10:11:32 AM	Helium MFC set to  0.000000
7/18/2011	10:11:32 AM	H2 MFC set to  0.000000
7/18/2011	10:11:32 AM	BCl3 MFC set to  0.000000
7/18/2011	10:11:32 AM	PHl3 MFC set to  0.000000
7/18/2011	10:11:32 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:11:32 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:11:32 AM	Tube furnace set to 0
7/18/2011	10:11:35 AM	H2 valve closed
7/18/2011	10:11:35 AM	BCl3 valve closed
7/18/2011	10:11:35 AM	PH3 valve closed
7/18/2011	10:11:35 AM	SiCl4 pre valve closed
7/18/2011	10:11:35 AM	SiCl4 post valve closed
7/18/2011	10:11:35 AM	Main Vac valve closed
7/18/2011	10:11:35 AM	Bypass valve closed
7/18/2011	10:11:35 AM	Bubbler valve closed
7/18/2011	10:11:35 AM	Helium valve opened
7/18/2011	10:11:35 AM	Helium MFC set to  500.000000
7/18/2011	10:11:35 AM	H2 MFC set to  0.000000
7/18/2011	10:11:35 AM	BCl3 MFC set to  0.000000
7/18/2011	10:11:35 AM	PHl3 MFC set to  0.000000
7/18/2011	10:11:35 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:11:35 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:11:36 AM	Tube furnace set to 0
7/18/2011	10:12:40 AM	Helium valve closed
7/18/2011	10:12:40 AM	H2 valve closed
7/18/2011	10:12:40 AM	BCl3 valve closed
7/18/2011	10:12:40 AM	PH3 valve closed
7/18/2011	10:12:40 AM	SiCl4 pre valve closed
7/18/2011	10:12:40 AM	SiCl4 post valve closed
7/18/2011	10:12:40 AM	Main Vac valve closed
7/18/2011	10:12:40 AM	Bypass valve closed
7/18/2011	10:12:40 AM	Bubbler valve closed
7/18/2011	10:12:40 AM	Helium MFC set to  0.000000
7/18/2011	10:12:40 AM	H2 MFC set to  0.000000
7/18/2011	10:12:40 AM	BCl3 MFC set to  0.000000
7/18/2011	10:12:40 AM	PHl3 MFC set to  0.000000
7/18/2011	10:12:40 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:12:40 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:12:40 AM	Tube furnace set to 0
7/18/2011	10:12:41 AM	Run finished at 10:12 AM
7/18/2011	10:12:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2011	10:14:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2011	10:14:44 AM	Recipe started at 10:14 AM
7/18/2011	10:14:44 AM	Helium valve closed
7/18/2011	10:14:44 AM	H2 valve closed
7/18/2011	10:14:44 AM	BCl3 valve closed
7/18/2011	10:14:44 AM	PH3 valve closed
7/18/2011	10:14:44 AM	SiCl4 pre valve closed
7/18/2011	10:14:44 AM	SiCl4 post valve closed
7/18/2011	10:14:44 AM	Main Vac valve closed
7/18/2011	10:14:44 AM	Bubbler valve closed
7/18/2011	10:14:44 AM	Bypass valve opened
7/18/2011	10:14:44 AM	Helium MFC set to  0.000000
7/18/2011	10:14:44 AM	H2 MFC set to  0.000000
7/18/2011	10:14:44 AM	BCl3 MFC set to  0.000000
7/18/2011	10:14:44 AM	PHl3 MFC set to  0.000000
7/18/2011	10:14:44 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:14:44 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:14:44 AM	Tube furnace set to 0
7/18/2011	10:15:43 AM	Helium valve closed
7/18/2011	10:15:43 AM	H2 valve closed
7/18/2011	10:15:43 AM	BCl3 valve closed
7/18/2011	10:15:43 AM	PH3 valve closed
7/18/2011	10:15:43 AM	SiCl4 pre valve closed
7/18/2011	10:15:43 AM	SiCl4 post valve closed
7/18/2011	10:15:43 AM	Main Vac valve closed
7/18/2011	10:15:43 AM	Bubbler valve closed
7/18/2011	10:15:43 AM	Bypass valve opened
7/18/2011	10:15:43 AM	Helium MFC set to  0.000000
7/18/2011	10:15:43 AM	H2 MFC set to  0.000000
7/18/2011	10:15:43 AM	BCl3 MFC set to  0.000000
7/18/2011	10:15:43 AM	PHl3 MFC set to  0.000000
7/18/2011	10:15:43 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:15:43 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:15:44 AM	Tube furnace set to 0
7/18/2011	10:16:44 AM	Helium valve closed
7/18/2011	10:16:44 AM	H2 valve closed
7/18/2011	10:16:44 AM	BCl3 valve closed
7/18/2011	10:16:44 AM	PH3 valve closed
7/18/2011	10:16:44 AM	SiCl4 pre valve closed
7/18/2011	10:16:44 AM	SiCl4 post valve closed
7/18/2011	10:16:44 AM	Bypass valve closed
7/18/2011	10:16:44 AM	Bubbler valve closed
7/18/2011	10:16:44 AM	Main Vac valve opened
7/18/2011	10:16:44 AM	Helium MFC set to  0.000000
7/18/2011	10:16:44 AM	H2 MFC set to  0.000000
7/18/2011	10:16:44 AM	BCl3 MFC set to  0.000000
7/18/2011	10:16:44 AM	PHl3 MFC set to  0.000000
7/18/2011	10:16:44 AM	SiCl4 MFC set to  0.000000
7/18/2011	10:16:44 AM	Bypass solenoid MFC set to  0.000000
7/18/2011	10:16:44 AM	Tube furnace set to 0
7/18/2011	10:16:45 AM	Run finished at 10:16 AM
7/18/2011	10:16:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2011	1:26:00 PM	Main Vac valve closed
7/18/2011	1:44:19 PM	Bypass valve opened
7/18/2011	1:46:04 PM	Bypass valve closed
7/18/2011	1:46:04 PM	Main Vac valve opened
7/18/2011	1:51:17 PM	Main Vac valve closed
7/18/2011	1:52:45 PM	Main Vac valve opened
7/18/2011	1:56:17 PM	Main Vac valve closed
7/18/2011	1:57:12 PM	Main Vac valve opened
7/18/2011	2:59:13 PM	Main Vac valve closed
7/18/2011	3:03:27 PM	Bypass valve opened
7/18/2011	3:03:47 PM	Bypass valve closed
7/18/2011	3:05:38 PM	Bypass valve opened
7/18/2011	3:05:40 PM	Bypass valve closed
7/18/2011	3:05:47 PM	Bypass valve opened
7/18/2011	3:05:51 PM	Bypass valve closed
7/18/2011	3:05:59 PM	Bypass valve opened
7/18/2011	3:07:19 PM	Bypass valve closed
7/18/2011	3:07:20 PM	Main Vac valve opened
7/18/2011	3:36:52 PM	Main Vac valve closed
7/18/2011	3:37:10 PM	Main Vac valve opened
7/18/2011	4:39:48 PM	Main Vac valve closed
7/18/2011	4:40:23 PM	Main Vac valve opened
7/18/2011	5:04:18 PM	Program exited cleanly
7/18/2011	5:04:29 PM	Program started normally
7/18/2011	5:04:29 PM	Helium valve closed
7/18/2011	5:04:29 PM	H2 valve closed
7/18/2011	5:04:29 PM	BCl3 valve closed
7/18/2011	5:04:29 PM	PH3 valve closed
7/18/2011	5:04:29 PM	SiCl4 pre valve closed
7/18/2011	5:04:29 PM	SiCl4 post valve closed
7/18/2011	5:04:29 PM	Main Vac valve closed
7/18/2011	5:04:29 PM	Bypass valve closed
7/18/2011	5:04:29 PM	Bubbler valve closed
7/18/2011	5:04:29 PM	Helium MFC set to  0.000000
7/18/2011	5:04:29 PM	H2 MFC set to  0.000000
7/18/2011	5:04:29 PM	BCl3 MFC set to  0.000000
7/18/2011	5:04:29 PM	PHl3 MFC set to  0.000000
7/18/2011	5:04:29 PM	SiCl4 MFC set to  0.000000
7/18/2011	5:04:29 PM	Bypass solenoid MFC set to  760.000000
7/18/2011	5:04:29 PM	Tube furnace set to 0
7/18/2011	5:04:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2011	5:04:54 PM	Recipe started at 5:04 PM
7/18/2011	5:04:54 PM	Helium valve closed
7/18/2011	5:04:54 PM	H2 valve closed
7/18/2011	5:04:54 PM	BCl3 valve closed
7/18/2011	5:04:54 PM	PH3 valve closed
7/18/2011	5:04:54 PM	SiCl4 pre valve closed
7/18/2011	5:04:54 PM	SiCl4 post valve closed
7/18/2011	5:04:54 PM	Main Vac valve closed
7/18/2011	5:04:54 PM	Bubbler valve closed
7/18/2011	5:04:54 PM	Bypass valve opened
7/18/2011	5:04:54 PM	Helium MFC set to  0.000000
7/18/2011	5:04:54 PM	H2 MFC set to  0.000000
7/18/2011	5:04:54 PM	BCl3 MFC set to  0.000000
7/18/2011	5:04:54 PM	PHl3 MFC set to  0.000000
7/18/2011	5:04:54 PM	SiCl4 MFC set to  0.000000
7/18/2011	5:04:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2011	5:04:54 PM	Tube furnace set to 0
7/18/2011	5:04:54 PM	Helium valve closed
7/18/2011	5:04:54 PM	H2 valve closed
7/18/2011	5:04:54 PM	BCl3 valve closed
7/18/2011	5:04:54 PM	PH3 valve closed
7/18/2011	5:04:54 PM	SiCl4 pre valve closed
7/18/2011	5:04:54 PM	SiCl4 post valve closed
7/18/2011	5:04:54 PM	Main Vac valve closed
7/18/2011	5:04:54 PM	Bubbler valve closed
7/18/2011	5:04:54 PM	Bypass valve opened
7/18/2011	5:04:54 PM	Helium MFC set to  0.000000
7/18/2011	5:04:54 PM	H2 MFC set to  0.000000
7/18/2011	5:04:54 PM	BCl3 MFC set to  0.000000
7/18/2011	5:04:54 PM	PHl3 MFC set to  0.000000
7/18/2011	5:04:54 PM	SiCl4 MFC set to  0.000000
7/18/2011	5:04:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2011	5:04:54 PM	Tube furnace set to 0
7/18/2011	5:05:00 PM	Helium valve closed
7/18/2011	5:05:00 PM	H2 valve closed
7/18/2011	5:05:00 PM	BCl3 valve closed
7/18/2011	5:05:00 PM	PH3 valve closed
7/18/2011	5:05:00 PM	SiCl4 pre valve closed
7/18/2011	5:05:00 PM	SiCl4 post valve closed
7/18/2011	5:05:00 PM	Bypass valve closed
7/18/2011	5:05:00 PM	Bubbler valve closed
7/18/2011	5:05:00 PM	Main Vac valve opened
7/18/2011	5:05:00 PM	Helium MFC set to  0.000000
7/18/2011	5:05:00 PM	H2 MFC set to  0.000000
7/18/2011	5:05:00 PM	BCl3 MFC set to  0.000000
7/18/2011	5:05:00 PM	PHl3 MFC set to  0.000000
7/18/2011	5:05:00 PM	SiCl4 MFC set to  0.000000
7/18/2011	5:05:00 PM	Bypass solenoid MFC set to  0.000000
7/18/2011	5:05:00 PM	Tube furnace set to 0
7/18/2011	5:05:01 PM	Run finished at 5:05 PM
7/18/2011	5:05:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2011	5:05:16 PM	Helium MFC set to  20.000000
7/18/2011	5:05:19 PM	Helium valve opened
7/18/2011	5:06:00 PM	Helium valve closed
7/18/2011	5:06:29 PM	Main Vac valve closed
7/18/2011	5:06:32 PM	Helium valve opened
7/18/2011	5:06:43 PM	Helium valve closed
7/18/2011	5:07:22 PM	Bypass valve opened
7/18/2011	5:07:23 PM	Bypass valve closed
7/18/2011	5:07:27 PM	Bypass valve opened
7/18/2011	5:07:35 PM	Bypass valve closed
7/18/2011	5:08:12 PM	Bypass valve opened
7/18/2011	5:08:19 PM	Bypass valve closed
7/18/2011	5:08:31 PM	Bypass valve opened
7/18/2011	5:08:44 PM	Bypass valve closed
7/18/2011	5:09:01 PM	Main Vac valve opened
